Electrochemical micromachining with nanosecond pulses voltage

Abstract

The development of electrochemical micromachining (EMM) was influenced greatly by the technology of pulses generator. In order to solve the problems of EMM, it was an effective method to use nanosecond pulses voltage in EMM. Therefore, a nanosecond pulses voltage was prepared firstly. Its minimum pulse duration is 5 ns, and its voltage, current, and duty ratio can be changed freely. Then the microelectrode of tungsten filament was fabricated in sodium hydroxide electrolyte. The cylindrical microelectrode was less than 30μm in diameter, 50 in ratio of length and diameter. It was used to fabricate micro structure by EMM milling layer by layer. The little gap can be realized by adjusting machine parameters, the process can be carried out by short circuit detected, and a fine micro structure also can be realized finally. The application of the nanosecond pulses voltage can make EMM a further development.