Electrochemical micromachining with ultra short voltage pulses

Abstract

The machining technology of electrochemical micromachining with ultra short voltage pulses (μPECM) is based on the already well-established fundamentals of common electrochemical manufacturing technologies. The enormous advantage of the highest manufacturing precision underlies the fact of the extremely small working gaps achievable through ultra short voltage pulses in nanosecond duration. This describes the main difference with common electrochemical technologies. With the theoretical resolution of 10 nm, this technology enables high precision manufacturing [4].