JOURNAL ARTICLE
Analysis of Thin Surface Films by Spectroscopic Ellipsometry.
Nobuyoshi HaraKatsuhisa Sugimoto
Year: 1997 Journal: Materia Japan Vol: 36 (4)Pages: 337-343 Publisher: Japan Institute of Metals
Keywords:
Ellipsometry Materials science Thin film Surface (topology) Analytical Chemistry (journal) Optics Nanotechnology Chemistry Physics Chromatography Mathematics Geometry
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2
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0.25
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Topics
Surface Roughness and Optical Measurements
Physical Sciences → Engineering → Computational Mechanics
nanoparticles nucleation surface interactions
Physical Sciences → Earth and Planetary Sciences → Atmospheric Science
Chemical and Physical Properties of Materials
Physical Sciences → Materials Science → Materials Chemistry
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