Spectroscopic ellipsometry study of In2O3 thin films

L. Miao; Sakae Tanemura; Yong Ge Cao; Gang Xu

doi:10.1007/s10854-007-9447-6

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Spectroscopic ellipsometry study of In2O3 thin films

L. Miao Sakae Tanemura Yong Ge Cao Gang Xu

Year: 2007 Journal: Journal of Materials Science Materials in Electronics Vol: 20 (S1)Pages: 71-75 Publisher: Springer Science+Business Media

DOI: 10.1007/s10854-007-9447-6

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Keywords:

Materials science Amorphous solid Refractive index Crystallite Ellipsometry Band gap Sputter deposition Analytical Chemistry (journal) Thin film Substrate (aquarium) Molar absorptivity Optics Helicon Sputtering Optoelectronics Crystallography Chemistry Plasma Physics Nanotechnology

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Topics

Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Chalcogenide Semiconductor Thin Films

Physical Sciences → Engineering → Electrical and Electronic Engineering

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