JOURNAL ARTICLE

Spectroscopic ellipsometry study of In2O3 thin films

L. MiaoSakae TanemuraYong Ge CaoGang Xu

Year: 2007 Journal:   Journal of Materials Science Materials in Electronics Vol: 20 (S1)Pages: 71-75   Publisher: Springer Science+Business Media
Keywords:
Materials science Amorphous solid Refractive index Crystallite Ellipsometry Band gap Sputter deposition Analytical Chemistry (journal) Thin film Substrate (aquarium) Molar absorptivity Optics Helicon Sputtering Optoelectronics Crystallography Chemistry Plasma Physics Nanotechnology

Metrics

8
Cited By
0.00
FWCI (Field Weighted Citation Impact)
11
Refs
0.08
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Transition Metal Oxide Nanomaterials
Physical Sciences →  Materials Science →  Polymers and Plastics
Chalcogenide Semiconductor Thin Films
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

Related Documents

JOURNAL ARTICLE

Characterization of Spectral Selectivity of Tin-doped In2O3 Thin Films Using Spectroscopic Ellipsometry

J. LiuH. WangYingkang YANG

Journal:   SVC ... Annual Technical Conference proceedings - Society of Vacuum Coaters. Technical Conference/Proceedings of the annual technical conference/Society of Vacuum Coaters Technical Conference proceedings Year: 2014 Vol: 57 Pages: 222-232
JOURNAL ARTICLE

Characterization of spectral selectivity of tin-doped In2O3 thin films using spectroscopic ellipsometry

Jing LiuHong WangYouran Yang

Journal:   Surface and Coatings Technology Year: 2014 Vol: 267 Pages: 45-52
JOURNAL ARTICLE

Spectroscopic ellipsometry of Palladium thin films

Brian Sullivan

Journal:   Open Collections Year: 2010
JOURNAL ARTICLE

Spectroscopic ellipsometry measurements of thin metal films

Harland G. TompkinsSonja TasicJeff BakerDiana Convey

Journal:   Surface and Interface Analysis Year: 2000 Vol: 29 (3)Pages: 179-187
© 2026 ScienceGate Book Chapters — All rights reserved.