A high linearity capacitive temperature sensor fabricated by metalmumps process

Abstract

This paper presents the design, analysis and measurement of a high linearity capacitive temperature sensor fabricated by MetalMUMPs process. The capacitive temperature sensor consists of two kinds of temperature sensitive capacitors, which are vertical movement temperature sensitive capacitor and lateral movement temperature sensitive capacitors. By using lateral capacitors to compensate the nonlinearity of vertical capacitor, high linearity and proper sensitivity characterization is achieved. The measured nonlinearity of the capacitive temperature sensor is less than 1%, and its sensitivity is 19.4 fF/K.