Low-Voltage Switching Characteristics of SrBi₂Ta₂O₉ Capacitors

Abstract

Ferroelectric capacitor arrays were fabricated using SrBi 2 Ta 2 O 9 (SBT) thin films. Hysteresis and pulse responses were measured as functions of capacitor size and applied voltage. The remanent polarization ( P r ) at 5 V does not depend on capacitor size, though P r at low applied voltage decreases considerably as capacitor size decreases below 10 µ m. High-voltage pulse application enhances low-voltage polarization switching. Retention characteristics strongly depend on operating voltage. Switching charge at 2 V or above is stable up to 10 4 s retention, while that at 1 V operation decreases with increasing retention time.