Improvement of Hydrogen Degradation in Pt/SrBi2Ta2-xNbxO9/Pt Capacitor

Akira Furuya; J. D. Cuchiaro

doi:10.1557/proc-574-353

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JOURNAL ARTICLE

Improvement of Hydrogen Degradation in Pt/SrBi₂Ta_2-xNb_xO₉/Pt Capacitor

Akira Furuya J. D. Cuchiaro

Year: 1999 Journal: MRS Proceedings Vol: 574 Publisher: Cambridge University Press

DOI: 10.1557/proc-574-353

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Keywords:

Materials science Ferroelectricity Annealing (glass) Dielectric Capacitor Oxide Hydrogen Tin Lead zirconate titanate Analytical Chemistry (journal) Optoelectronics Composite material Metallurgy Electrical engineering Voltage

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Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Improvement of Hydrogen Degradation in Pt/SrBi₂Ta_2-xNb_xO₉/Pt Capacitor

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