An efficient adaptive dispatching method for semiconductor wafer fabrication facility

Li Li; Zhihong Min

doi:10.1007/s00170-016-8410-1

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An efficient adaptive dispatching method for semiconductor wafer fabrication facility

Li Li Zhihong Min

Year: 2016 Journal: The International Journal of Advanced Manufacturing Technology Vol: 84 (1-4)Pages: 315-325 Publisher: Springer Science+Business Media

DOI: 10.1007/s00170-016-8410-1

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Keywords:

Scheduling (production processes) Semiconductor device fabrication Weighting FIFO (computing and electronics) Wafer fabrication Computer science Real-time computing Wafer Engineering Mathematical optimization Computer hardware Mathematics

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Scheduling and Optimization Algorithms

Physical Sciences → Engineering → Industrial and Manufacturing Engineering

Advanced Manufacturing and Logistics Optimization

Physical Sciences → Engineering → Industrial and Manufacturing Engineering

Advanced Control Systems Optimization

Physical Sciences → Engineering → Control and Systems Engineering

An efficient adaptive dispatching method for semiconductor wafer fabrication facility

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