BOOK-CHAPTER

Quasi-periodically Actuated Capacitive MEMS

Faouzi LakradMohamed Belhaq

Year: 2015 Springer proceedings in physics Pages: 183-200   Publisher: Springer Nature
Keywords:
Capacitive sensing Microelectromechanical systems Materials science Electrical engineering Optoelectronics Engineering

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2
Cited By
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FWCI (Field Weighted Citation Impact)
15
Refs
0.12
Citation Normalized Percentile
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Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
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