Quasi-periodically Actuated Capacitive MEMS

BOOK-CHAPTER

Year: 2015 Springer proceedings in physics Pages: 183-200 Publisher: Springer Nature

DOI: 10.1007/978-3-319-19851-4_10

Keywords:

Capacitive sensing Microelectromechanical systems Materials science Electrical engineering Optoelectronics Engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering