Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Xunjun He; Qun Wu; Yue Wang; Mingxin Song; Jinghua Yin

doi:10.1007/s00542-008-0702-4

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Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Xunjun He Qun Wu Yue Wang Mingxin Song Jinghua Yin

Year: 2008 Journal: Microsystem Technologies Vol: 15 (2)Pages: 301-307 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-008-0702-4

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Keywords:

Microbeam Capacitive sensing Microelectromechanical systems Finite element method Computation Computer simulation Numerical analysis Materials science Electronic engineering Computer science Engineering Electrical engineering Structural engineering Optoelectronics Physics Simulation Optics Mathematics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

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