JOURNAL ARTICLE

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

Xunjun HeQun WuYue WangMingxin SongJinghua Yin

Year: 2008 Journal:   Microsystem Technologies Vol: 15 (2)Pages: 301-307   Publisher: Springer Science+Business Media
Keywords:
Microbeam Capacitive sensing Microelectromechanical systems Finite element method Computation Computer simulation Numerical analysis Materials science Electronic engineering Computer science Engineering Electrical engineering Structural engineering Optoelectronics Physics Simulation Optics Mathematics

Metrics

21
Cited By
1.14
FWCI (Field Weighted Citation Impact)
10
Refs
0.81
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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