CMOS Compatible Capacitive Pressure Sensor with Read-Out Electronics

M. Kandler; J. Eichholz; Yiannos Manoli; W. Mokwa

doi:10.1007/978-3-642-45678-7_81

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CMOS Compatible Capacitive Pressure Sensor with Read-Out Electronics

M. Kandler J. Eichholz Yiannos Manoli W. Mokwa

Year: 1990 Pages: 574-580

DOI: 10.1007/978-3-642-45678-7_81

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Keywords:

Capacitive sensing Pressure sensor Signal conditioning Capacitor Materials science Fabrication Electrical engineering Chip CMOS Planar Electronics SIGNAL (programming language) Optoelectronics Electronic engineering Engineering Computer science Voltage Power (physics) Mechanical engineering Physics

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Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

CMOS Compatible Capacitive Pressure Sensor with Read-Out Electronics

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