BOOK-CHAPTER

CMOS Compatible Capacitive Pressure Sensor with Read-Out Electronics

Keywords:
Capacitive sensing Pressure sensor Signal conditioning Capacitor Materials science Fabrication Electrical engineering Chip CMOS Planar Electronics SIGNAL (programming language) Optoelectronics Electronic engineering Engineering Computer science Voltage Power (physics) Mechanical engineering Physics

Metrics

11
Cited By
5.74
FWCI (Field Weighted Citation Impact)
1
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Sensor Technology and Measurement Systems
Physical Sciences →  Computer Science →  Computer Networks and Communications
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering

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