Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN–TiB2–TiSi2

Oleksandr Pshyk; Emerson Coy; Luis Yate; Karol Załęski; Grzegorz Nowaczyk; A.D. Pogrebnjak; Stefan Jurga

doi:10.1016/j.matdes.2015.12.174

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Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN–TiB2–TiSi2

Oleksandr Pshyk Emerson Coy Luis Yate Karol Załęski Grzegorz Nowaczyk A.D. Pogrebnjak Stefan Jurga

Year: 2016 Journal: Materials & Design Vol: 94 Pages: 230-239 Publisher: Elsevier BV

DOI: 10.1016/j.matdes.2015.12.174

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Keywords:

Materials science Nanoindentation Sputtering Sputter deposition Microstructure Scanning electron microscope Composite material X-ray photoelectron spectroscopy Amorphous solid Elastic modulus Raman spectroscopy Silicon Substrate (aquarium) Transmission electron microscopy Layer (electronics) Thin film Metallurgy Crystallography Chemical engineering Nanotechnology Optics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Boron and Carbon Nanomaterials Research

Physical Sciences → Materials Science → Materials Chemistry

Combined reactive/non-reactive DC magnetron sputtering of high temperature composite AlN–TiB2–TiSi2

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