JOURNAL ARTICLE

Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization

Ailian ChenYang ChenJianning Ding

Year: 2015 Journal:   Journal of Electronic Materials Vol: 44 (7)Pages: 2522-2528   Publisher: Springer Science+Business Media
Keywords:
Chemical-mechanical planarization Materials science Composite material Wafer Dynamic light scattering Surface roughness Scanning electron microscope Polystyrene Composite number Indentation Particle size Core (optical fiber) Oxide Transmission electron microscopy Surface finish Polishing Chemical engineering Nanotechnology Nanoparticle Metallurgy Polymer

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11
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0.35
FWCI (Field Weighted Citation Impact)
29
Refs
0.64
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Citation History

Topics

Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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