Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization

Ailian Chen; Yang Chen; Jianning Ding

doi:10.1007/s11664-015-3815-4

ScienceGate Book Chapters

JOURNAL ARTICLE

Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization

Ailian Chen Yang Chen Jianning Ding

Year: 2015 Journal: Journal of Electronic Materials Vol: 44 (7)Pages: 2522-2528 Publisher: Springer Science+Business Media

DOI: 10.1007/s11664-015-3815-4

Get Full-Text PDF Get Analytical Report

Keywords:

Chemical-mechanical planarization Materials science Composite material Wafer Dynamic light scattering Surface roughness Scanning electron microscope Polystyrene Composite number Indentation Particle size Core (optical fiber) Oxide Transmission electron microscopy Surface finish Polishing Chemical engineering Nanotechnology Nanoparticle Metallurgy Polymer

Metrics

Cited By

0.35

FWCI (Field Weighted Citation Impact)

Refs

0.64

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Polystyrene-Core Silica-Shell Composite Abrasives: The Influence of Core Size on Oxide Chemical Mechanical Planarization

Metrics

Citation History

Topics

Related Documents

Ceria coated hexagonal mesoporous silica core–shell composite particle abrasives for improved chemical–mechanical planarization performance

Composite Polymer Core–Silica Shell Abrasives

Preparation, characterization and oxide CMP performance of composite polystyrene-core ceria-shell abrasives

Synergetic effect of organic cores and inorganic shells for core/shell structured composite abrasives for chemical mechanical planarization

Core–Shell Structured Silica Nanoparticles as Abrasive for Tungsten Chemical Mechanical Planarization