Synergetic effect of organic cores and inorganic shells for core/shell structured composite abrasives for chemical mechanical planarization

Yang Chen; Zhina Li; Naiming Miao

doi:10.1016/j.apsusc.2014.06.166

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Synergetic effect of organic cores and inorganic shells for core/shell structured composite abrasives for chemical mechanical planarization

Yang Chen Zhina Li Naiming Miao

Year: 2014 Journal: Applied Surface Science Vol: 314 Pages: 180-187 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2014.06.166

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Keywords:

Chemical-mechanical planarization Materials science Composite number Abrasive Composite material Slurry Surface roughness Polystyrene Shell (structure) Core (optical fiber) Polishing Polymer

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Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Synergetic effect of organic cores and inorganic shells for core/shell structured composite abrasives for chemical mechanical planarization

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