JOURNAL ARTICLE

Characterization of Al2O3 thin films fabricated through atomic layer deposition on polymeric substrates

Kamran AliChang Young KimKyung Hyun Choi

Year: 2014 Journal:   Journal of Materials Science Materials in Electronics Vol: 25 (4)Pages: 1922-1932   Publisher: Springer Science+Business Media
Keywords:
Polyethylene naphthalate Polyamide Materials science Polyethylene terephthalate Fabrication X-ray photoelectron spectroscopy Layer (electronics) Thin film Transmittance Deposition (geology) Atomic layer deposition Surface roughness Chemical engineering Polyethylene Substrate (aquarium) Carbon film Composite material Analytical Chemistry (journal) Nanotechnology Optoelectronics Chemistry Organic chemistry

Metrics

10
Cited By
0.74
FWCI (Field Weighted Citation Impact)
29
Refs
0.79
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Memory and Neural Computing
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry

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