JOURNAL ARTICLE
Characterization of Al2O3 thin films fabricated through atomic layer deposition on polymeric substrates
Kamran AliChang Young KimKyung Hyun Choi
Year: 2014 Journal: Journal of Materials Science Materials in Electronics Vol: 25 (4)Pages: 1922-1932 Publisher: Springer Science+Business Media
Keywords:
Polyethylene naphthalate Polyamide Materials science Polyethylene terephthalate Fabrication X-ray photoelectron spectroscopy Layer (electronics) Thin film Transmittance Deposition (geology) Atomic layer deposition Surface roughness Chemical engineering Polyethylene Substrate (aquarium) Carbon film Composite material Analytical Chemistry (journal) Nanotechnology Optoelectronics Chemistry Organic chemistry
Metrics
10
Cited By
0.74
FWCI (Field Weighted Citation Impact)
29
Refs
0.79
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advanced Memory and Neural Computing
Physical Sciences → Engineering → Electrical and Electronic Engineering
Diamond and Carbon-based Materials Research
Physical Sciences → Materials Science → Materials Chemistry
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