Cavity optomechanical sensors for atomic force microscopy

Kartik Srinivasan; Houxun Miao; Matthew T. Rakher; Marcelo Davanço; Vladimir Aksyuk

doi:10.1364/cleo_si.2011.cthj2

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Cavity optomechanical sensors for atomic force microscopy

Kartik Srinivasan Houxun Miao Matthew T. Rakher Marcelo Davanço Vladimir Aksyuk

Year: 2011 Vol: 76 Pages: CThJ2-CThJ2

DOI: 10.1364/cleo_si.2011.cthj2

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Abstract

We develop a silicon cavity optomechanical sensor for atomic force microscopy through near-field coupling between a nanocantilever and microdisk cavity. The device exhibits sub-fm/ Hz displacement sensitivity, GHz bandwidth, and > 60 dB of dynamic range.

Keywords:

Atomic force microscopy Microscopy Optoelectronics Nanotechnology Materials science Atomic force acoustic microscopy Physics Magnetic force microscope Optics Quantum mechanics

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Cavity optomechanical sensors for atomic force microscopy

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