JOURNAL ARTICLE
Wide Stiffness Range Cavity Optomechanical Sensors for Atomic Force Microscopy
Yuxiang LiuHouxun MiaoVladimir AksyukKartik Srinivasan
Year: 2012 Journal: Advanced Photonics Congress Pages: IW2C.5-IW2C.5
Abstract
We present chip-based sensors that integrate nanomechanical cantilevers with near-field optical readout for atomic force microscopy. Cantilever stiffness is varied over four orders of magnitude while maintaining fm/Hz1/2 displacement sensitivity, indicating potential in wide-ranging applications.
Keywords:
Cantilever Atomic force microscopy Stiffness Materials science Microscopy Displacement (psychology) Optoelectronics Ranging Non-contact atomic force microscopy Dynamic range Optical microscope Optics Chip Sensitivity (control systems) Conductive atomic force microscopy Nanotechnology Physics Electrical engineering Electronic engineering Computer science Engineering Composite material
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Topics
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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