Nickel titanium (TiNi) shape memory alloy thin film is a promising candidate for microactuation because of its large deformation and recovery force, good electrical and mechanical properties, long fatigue life, and high corrosion resistance.
James Alfred WalkerK.J. GabrielMehran Mehregany
Daniel D. ShinK. P. MohanchandraDong Gun LeeGregory P. Carman
Hitoshi TakagiK. OkanoSaulius JuodkazisShigeki MatsuoHiroaki Misawa
K. IkutaHiroyuki FujitaMitsuhisa IkedaShunichi Yamashita