Miniature actuator using thin-film shape-memory alloy

Abstract

In this paper, a thin film nickel-titanium (NiTi) shape memory alloy (SMA) was used to develop a prototype compact hybrid actuator. SMA was selected as an actuating mechanism because it had the highest work density among active materials. Combining this attribute with high frequency response of thin films resulted in large power output. High drive frequency was also possible in part from manipulating the liquid flow to directly cool the SMA membranes. The actuator reached a drive frequency of 100Hz while producing 2.6Watts. The results indicated that power output is linearly related to the drive frequency since the volume flow rate increased proportional to frequency.