Thin- and thick-film structures for miniature biomedical sensors

Abstract

Physical and chemical miniature biomedical sensors fan be fabricated using thin- and thick-film technology. Devices such as biopotential electrodes; temperature, force, and compliant strain gauge sensors; and ion-selective electrodes have been designed, constructed, and applied to biomedical problems. Sometimes there are advantages to depositing non-conventional materials, thicker films, and thin- thick-film hybrid structures in fabricating biomedical sensors.