Thick and thin film heaters for gas sensors

Abstract

Thick film RuO₂, AuPt, and thin film Pt heaters of different shapes were manufactured to enable operation of a semiconductor gas sensor at elevated temperatures. Different bonding techniques, i.e., soldering, thermocompression, and ultracompression using Au, Pt, PtRh, Al, and Cu wires, were adopted. Surface temperature distribution was determined with the help of thermovision and point thermocouple measurements. Aging tests reveal good performance of both thick and thin film heaters at temperatures of about 300 degree(s)C. A new method of heater temperature control is described.