Nb/sub 3/Al thin films made by RF magnetron sputtering process with a single target

Abstract

We have studied a high field pulsed superconductor with high elastic modulus fiber reinforcement. We call the conductor Fiber Reinforced Superconductor (FRS). We have succeeded in making a sputtering target which consists of reacted Nb/sub 3/Sn single material by powder metallurgy. Nb/sub 3/Al superconductor is well known as a candidate for superconducting magnets for fusion reactors because of good properties of mechanical stress and irradiation toughness. To overcome the difficulty of fabricating into superconducting wire, we have made a single sputtering target of Nb-Al compound by powder metallurgy. Thin Nb/sub 3/Al films on MgO substrate were made using this target. Experimental results for these films are presented.