Nb3Al thin films made by single RF magnetron sputtering target

K. Agatsuma; Hiroshi Tateishi; K. Arai; M. Umeda; Takashi Saitoh; K. Gotoh

doi:10.1016/s0921-4534(02)01031-6

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Nb3Al thin films made by single RF magnetron sputtering target

K. Agatsuma Hiroshi Tateishi K. Arai M. Umeda Takashi Saitoh K. Gotoh

Year: 2002 Journal: Physica C Superconductivity Vol: 372-376 Pages: 1378-1381 Publisher: Elsevier BV

DOI: 10.1016/s0921-4534(02)01031-6

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Keywords:

Materials science Thin film Sputter deposition Sapphire Sputtering Substrate (aquarium) Diffraction Superconductivity Single crystal Phase (matter) Optoelectronics Cavity magnetron Metallurgy Optics Condensed matter physics Crystallography Nanotechnology Chemistry Physics

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Superconducting Materials and Applications

Physical Sciences → Engineering → Biomedical Engineering

Particle accelerators and beam dynamics

Physical Sciences → Engineering → Aerospace Engineering

Physics of Superconductivity and Magnetism

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Nb3Al thin films made by single RF magnetron sputtering target

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