Integration and electrical characterization of carbon nanotube via interconnects

Nicolò Chiodarelli; Yunlong Li; Daire Cott; S. Mertens; Nick Peys; Marc Heyns; Stefan De Gendt; G. Groeseneken; Philippe M. Vereecken

doi:10.1016/j.mee.2010.06.017

JOURNAL ARTICLE

Integration and electrical characterization of carbon nanotube via interconnects

Nicolò Chiodarelli Yunlong Li Daire Cott S. Mertens Nick Peys Marc Heyns Stefan De Gendt G. Groeseneken Philippe M. Vereecken

Year: 2010 Journal: Microelectronic Engineering Vol: 88 (5)Pages: 837-843 Publisher: Elsevier BV

DOI: 10.1016/j.mee.2010.06.017

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Keywords:

Materials science Carbon nanotube Contact resistance Wafer Electrical contacts Nanotechnology Chemical-mechanical planarization Tungsten Annealing (glass) Chemical vapor deposition Electrical resistance and conductance Transistor Polishing Composite material Metallurgy Electrical engineering

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Carbon Nanotubes in Composites

Physical Sciences → Materials Science → Materials Chemistry

Graphene research and applications

Physical Sciences → Materials Science → Materials Chemistry

Neuroscience and Neural Engineering

Life Sciences → Neuroscience → Cellular and Molecular Neuroscience

Integration and electrical characterization of carbon nanotube via interconnects

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