Low cost thin film based piezoresistive MEMS tactile sensor

A. Wisitsoraat; Viyapon Patthanasetakul; T. Lomas; Adisorn Tuantranont

doi:10.1016/j.sna.2006.10.037

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Low cost thin film based piezoresistive MEMS tactile sensor

A. Wisitsoraat Viyapon Patthanasetakul T. Lomas Adisorn Tuantranont

Year: 2006 Journal: Sensors and Actuators A Physical Vol: 139 (1-2)Pages: 17-22 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2006.10.037

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Keywords:

Materials science Microelectromechanical systems Fabrication Tactile sensor Optoelectronics Surface micromachining Silicon Layer (electronics) Photoresist Shadow mask Substrate (aquarium) Piezoresistive effect Sputtering Wafer Thin film Nanotechnology Optics Computer science

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Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Gas Sensing Nanomaterials and Sensors

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Physical Sciences → Engineering → Biomedical Engineering

Low cost thin film based piezoresistive MEMS tactile sensor

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