JOURNAL ARTICLE
MEMS based low cost piezoresistive microcantilever force sensor and sensor module
Hardik J. PandyaHyun Tae KimRajarshi RoyJaydev P. Desai
Year: 2014 Journal: Materials Science in Semiconductor Processing Vol: 19 Pages: 163-173 Publisher: Elsevier BV
Keywords:
Materials science Piezoresistive effect Wafer Silicon on insulator Microelectromechanical systems Silicon Annealing (glass) Optoelectronics Sputter deposition Substrate (aquarium) Cantilever Composite material Sputtering Residual stress Fabrication Nanotechnology Thin film
Metrics
37
Cited By
2.49
FWCI (Field Weighted Citation Impact)
45
Refs
0.91
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Force Microscopy Techniques and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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