JOURNAL ARTICLE

MEMS based low cost piezoresistive microcantilever force sensor and sensor module

Hardik J. PandyaHyun Tae KimRajarshi RoyJaydev P. Desai

Year: 2014 Journal:   Materials Science in Semiconductor Processing Vol: 19 Pages: 163-173   Publisher: Elsevier BV
Keywords:
Materials science Piezoresistive effect Wafer Silicon on insulator Microelectromechanical systems Silicon Annealing (glass) Optoelectronics Sputter deposition Substrate (aquarium) Cantilever Composite material Sputtering Residual stress Fabrication Nanotechnology Thin film

Metrics

37
Cited By
2.49
FWCI (Field Weighted Citation Impact)
45
Refs
0.91
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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