Fabrication and Characterization of As Doped p-Type ZnO Films Grown by Magnetron Sputtering

Jincheng Fan; C. C. Ling; Zhong Xie

doi:10.5772/19233

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Fabrication and Characterization of As Doped p-Type ZnO Films Grown by Magnetron Sputtering

Jincheng Fan C. C. Ling Zhong Xie

Year: 2011 InTech eBooks

DOI: 10.5772/19233

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Keywords:

Materials science Sputter deposition Fabrication Characterization (materials science) Doping Optoelectronics Sputtering Cavity magnetron Nanotechnology Thin film Medicine

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Copper-based nanomaterials and applications

Physical Sciences → Materials Science → Materials Chemistry

Fabrication and Characterization of As Doped p-Type ZnO Films Grown by Magnetron Sputtering

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