JOURNAL ARTICLE
Growth, microstructure, and resistivity of RuO2 thin films grown by metal-organic chemical vapor deposition
J. VetroneC. M. FosterG-R. BaiA. WangJay B. PatelXian Wu
Year: 1998 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 13 (8)Pages: 2281-2290 Publisher: Springer Nature
Keywords:
Materials science Metalorganic vapour phase epitaxy Chemical vapor deposition Texture (cosmology) Crystallite Thin film Electrical resistivity and conductivity Analytical Chemistry (journal) Microstructure Phase (matter) Grain size Deposition (geology) Metal Grain growth Chemical engineering Mineralogy Metallurgy Nanotechnology Epitaxy Layer (electronics) Chemistry
Metrics
41
Cited By
2.02
FWCI (Field Weighted Citation Impact)
31
Refs
0.87
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Electronic and Structural Properties of Oxides
Physical Sciences → Materials Science → Materials Chemistry
Ferroelectric and Piezoelectric Materials
Physical Sciences → Materials Science → Materials Chemistry
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
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