JOURNAL ARTICLE
High Confinement Micro-Ring Resonators in Silicon-on-Insulator
Luis G. Rodríguez MartínezMichal Lipson
Year: 2006 Vol: 43 Pages: 29-31
Abstract
We demonstrate high confinement silicon devices including suspended micrometer-scale ring resonators with high Q's in a CMOS platform
Keywords:
Silicon on insulator Resonator Silicon Materials science Optoelectronics Optical ring resonators Micrometer CMOS Ring (chemistry) Optics Physics Chemistry
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Topics
Photonic and Optical Devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Photonic Crystals and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
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