JOURNAL ARTICLE
III-Nitride Photonic Crystals for Blue and UV Emitters
Jagat ShakyaK. H. KimJ. LiJ. Y. LinH. X. JiangTom Oder
Year: 2003 Journal: MRS Proceedings Vol: 798 Publisher: Cambridge University Press
Keywords:
Materials science Light-emitting diode Optoelectronics Nitride Electron-beam lithography Photonic crystal Dry etching Inductively coupled plasma Nanolithography Wavelength Nanosphere lithography Diode Fabrication Photonics Lithography Optics Etching (microfabrication) Plasma Resist Nanotechnology
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Cited By
0.23
FWCI (Field Weighted Citation Impact)
12
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0.58
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Topics
Photonic Crystals and Applications
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
GaN-based semiconductor devices and materials
Physical Sciences → Physics and Astronomy → Condensed Matter Physics
Optical Coatings and Gratings
Physical Sciences → Materials Science → Surfaces, Coatings and Films
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