Two-dimensional photonic crystals for GaN-based blue light emitters

Tomoyuki Yoshie; Chuan-Cheng Cheng; Axel Scherer

doi:10.1109/islc.1998.734200

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JOURNAL ARTICLE

Two-dimensional photonic crystals for GaN-based blue light emitters

Tomoyuki Yoshie Chuan-Cheng Cheng Axel Scherer

Year: 2002 Vol: 44 Pages: 189-190

DOI: 10.1109/islc.1998.734200

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Abstract

We successfully fabricated two-dimensional photonic crystal structures for III-nitride light emitters by integrating electron-beam lithography, xenon/chlorine-based chemically assisted ion beam etching and a multilayer pattern transfer.

Keywords:

Photonic crystal Optoelectronics Materials science Gallium nitride Photonics Wide-bandgap semiconductor Blue light Optics Physics Nanotechnology

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Topics

Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

GaN-based semiconductor devices and materials

Physical Sciences → Physics and Astronomy → Condensed Matter Physics

Two-dimensional photonic crystals for GaN-based blue light emitters

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