Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning

P. Leǐderer; M. Mosbacher; Johannes Boneberg; C. Bartels; Fabian Lang; Conrado Ramos Moreira Afonso; Dieter Baeuerle

doi:10.4028/www.scientific.net/ssp.92.133

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Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning

P. Leǐderer M. Mosbacher Johannes Boneberg C. Bartels Fabian Lang Conrado Ramos Moreira Afonso Dieter Baeuerle

Year: 2003 Journal: Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Vol: 92 Pages: 133-134 Publisher: Scientific.net

DOI: 10.4028/www.scientific.net/ssp.92.133

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Keywords:

Materials science Dry cleaning Silicon Particle (ecology) Metallurgy Laser Waste management Optics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-Ablation Synthesis of Nanoparticles

Physical Sciences → Engineering → Biomedical Engineering

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning

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