JOURNAL ARTICLE

Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning

P. LeǐdererM. MosbacherJohannes BonebergC. BartelsFabian LangConrado Ramos Moreira AfonsoDieter Baeuerle

Year: 2003 Journal:   Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena Vol: 92 Pages: 133-134   Publisher: Scientific.net
Keywords:
Materials science Dry cleaning Silicon Particle (ecology) Metallurgy Laser Waste management Optics

Metrics

6
Cited By
0.43
FWCI (Field Weighted Citation Impact)
0
Refs
0.67
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Laser-Ablation Synthesis of Nanoparticles
Physical Sciences →  Engineering →  Biomedical Engineering
Laser-induced spectroscopy and plasma
Physical Sciences →  Engineering →  Mechanics of Materials

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