JOURNAL ARTICLE

Laser assisted particle removal ‘dry’ cleaning of critical surfaces

Susan D. AllenA.S. MillerS.J. Lee

Year: 1997 Journal:   Materials Science and Engineering B Vol: 49 (2)Pages: 85-88   Publisher: Elsevier BV
Keywords:
Substrate (aquarium) Particle (ecology) Laser Condensation Materials science Energy transfer Chemical engineering Optics Chemistry Chemical physics Thermodynamics Physics

Metrics

15
Cited By
0.00
FWCI (Field Weighted Citation Impact)
3
Refs
0.13
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Laser-induced spectroscopy and plasma
Physical Sciences →  Engineering →  Mechanics of Materials
Electrohydrodynamics and Fluid Dynamics
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Laser-Ablation Synthesis of Nanoparticles
Physical Sciences →  Engineering →  Biomedical Engineering

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Laser assisted particle removal

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