Oxidized Porous Silicon: From Dielectric Isolation to Integrated Optical Waveguides

V. A. Yakovtseva; L. Dolgyi; N. Vorozov; N.M. Kazuchits; Vitaly Bondarenko; M. Balucani; G. Lamedica; Luisa Franchina; Aldo Ferrari

doi:10.1023/a:1009647007232

JOURNAL ARTICLE

Oxidized Porous Silicon: From Dielectric Isolation to Integrated Optical Waveguides

V. A. Yakovtseva L. Dolgyi N. Vorozov N.M. Kazuchits Vitaly Bondarenko M. Balucani G. Lamedica Luisa Franchina Aldo Ferrari

Year: 2000 Journal: Journal of Porous Materials Vol: 7 (1-3)Pages: 215-222 Publisher: Springer Science+Business Media

DOI: 10.1023/a:1009647007232

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Keywords:

Materials science Fabrication Porous silicon Silicon Optoelectronics Nanotechnology Dielectric Thermal oxidation Silicon on insulator Electrolyte Porosity Insulator (electricity) Electrode Composite material Chemistry

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Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Oxidized Porous Silicon: From Dielectric Isolation to Integrated Optical Waveguides

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