Characterization of integrated optical waveguides based on oxidized porous silicon

Abstract

Integrated optical waveguides based on oxidized porous silicon were fabricated by means of traditional silicon technology. Near-field pattern and out-of-plane scattering losses were measured to characterize optical properties of the waveguides. Strong confinement of light within the core of the waveguides as well as optical losses of about 5 dB/cm have been demonstrated in the visible range. The achieved results make the waveguides promising in optoelectronics use.