JOURNAL ARTICLE

Thermal stability of carbon nitride thin films

Niklas HellgrenNian LinEsteban BroitmanV. SerinS.E. GrilloRay D. TwestenI. PetrovC. ColliexLars HultmanJ.‐E. Sundgren

Year: 2001 Journal:   Journal of materials research/Pratt's guide to venture capital sources Vol: 16 (11)Pages: 3188-3201   Publisher: Springer Nature
Keywords:
Annealing (glass) Materials science X-ray photoelectron spectroscopy Raman spectroscopy Thermal stability Nitride Amorphous solid Carbon nitride Analytical Chemistry (journal) Carbon film Amorphous carbon Microstructure Sputter deposition Thin film Sputtering Chemical engineering Crystallography Composite material Nanotechnology Chemistry Optics Layer (electronics) Organic chemistry

Metrics

51
Cited By
2.98
FWCI (Field Weighted Citation Impact)
32
Refs
0.92
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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