Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo; Kazuhiko Yamasaki; Saulius Juodkazis; Shigeki Matsuo; Vygantas Mizeikis; Hiroaki Misawa

doi:10.1016/j.tsf.2003.11.180

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Three-dimensional microfabrication by femtosecond pulses in dielectrics

Toshiaki Kondo Kazuhiko Yamasaki Saulius Juodkazis Shigeki Matsuo Vygantas Mizeikis Hiroaki Misawa

Year: 2004 Journal: Thin Solid Films Vol: 453-454 Pages: 550-556 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2003.11.180

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Keywords:

Microfabrication Femtosecond Optics Materials science Numerical aperture Photoresist Laser Dielectric Surface micromachining Laser ablation Holography Lens (geology) Ripple Wavefront Optoelectronics Nanotechnology Physics Fabrication Layer (electronics)

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Three-dimensional microfabrication by femtosecond pulses in dielectrics

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