Femtosecond laser-assisted three-dimensional microfabrication in silica

Abstract

We demonstrate direct three-dimensional (3-D) microfabrication inside a volume of silica glass. The whole fabrication process was carried out in two steps:(i) writing of the preprogrammed 3-D pattern inside silica glass by focused femtosecond (fs) laser pulses and (ii) etching of the written structure in a 5% aqueous solution of HF acid. This technique allows fabrication of 3-D channels as small as 10μm in diameter inside the volume with any angle of interconnection and a high aspect ratio (10μm -diameter channels in a 100μm -thick silica slab).