In this paper, a new interface concept is described for the design of a closed-loop accelerometer based upon micromachined capacitive sensing element. In comparison to the ordinary approaches, the new interface only consists of a switched flip-flop circuit. The interface circuit is low in component count, which makes it particularly suitable for prototype evaluation. The theoretical considerations agree well with the simulation results in Matlab SIMULINK and experimental results
Carlos García-RubioO. RuizS.A. BotaJosep Samitier
Rui ChenLu YouWei LangPeiyuan WanChi ZhangPing LinWeiguo SuWei Zhang
Michaël KraftC.P. LewisThomas G. HeskethStefan Szymkowiak