A novel micromachined accelerometer capacitive interface

Michaël Kraft; C.P. Lewis; Thomas G. Hesketh; Stefan Szymkowiak

doi:10.1016/s0924-4247(98)00064-8

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A novel micromachined accelerometer capacitive interface

Michaël Kraft C.P. Lewis Thomas G. Hesketh Stefan Szymkowiak

Year: 1998 Journal: Sensors and Actuators A Physical Vol: 68 (1-3)Pages: 466-473 Publisher: Elsevier BV

DOI: 10.1016/s0924-4247(98)00064-8

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Keywords:

Accelerometer Oversampling Capacitive sensing Interface (matter) SIGNAL (programming language) Electronic engineering Computer science Delta-sigma modulation Digital signal Electrical engineering Engineering Digital signal processing

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced Sensor Technologies Research

Physical Sciences → Engineering → Biomedical Engineering

A novel micromachined accelerometer capacitive interface

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