JOURNAL ARTICLE

MOCVD of SrTa2O6Thin Films for High-k Applications

Keywords:
Materials science Amorphous solid Metalorganic vapour phase epitaxy Analytical Chemistry (journal) Chemical vapor deposition Thin film Annealing (glass) Stoichiometry Permittivity Atmospheric temperature range Dielectric Epitaxy Optoelectronics Nanotechnology Crystallography Layer (electronics) Composite material Physical chemistry

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3
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0.30
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6
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0.64
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Citation History

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Electronic and Structural Properties of Oxides
Physical Sciences →  Materials Science →  Materials Chemistry
Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry

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