Atomic layer deposition of PbZrO3 thin films

Jenni Harjuoja; S. Väyrynen; Matti Putkonen; Lauri Niinistö; Eero Rauhala

doi:10.1016/j.apsusc.2006.11.041

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Atomic layer deposition of PbZrO3 thin films

Jenni Harjuoja S. Väyrynen Matti Putkonen Lauri Niinistö Eero Rauhala

Year: 2006 Journal: Applied Surface Science Vol: 253 (12)Pages: 5228-5232 Publisher: Elsevier BV

DOI: 10.1016/j.apsusc.2006.11.041

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Keywords:

Lead zirconate titanate Materials science Zirconate Zirconium Stoichiometry Perovskite (structure) Deposition (geology) Thin film Layer (electronics) Atomic layer deposition Surface roughness Chemical engineering Analytical Chemistry (journal) Mineralogy Nanotechnology Ferroelectricity Metallurgy Composite material Titanate Chemistry Dielectric Ceramic Physical chemistry Optoelectronics Organic chemistry

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Atomic layer deposition of PbZrO3 thin films

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