Catalyst synthesis and growth of indium nitride nanodots

Abstract

The technique of indium droplets catalyst is used for the synthesis of InN nanodots on (0001) sapphire substrates via metalorganic chemical vapor deposition (MOCVD) technique using trimethyindium (TMIn: (CH/sub 3/)/sub 3/In) and NH/sub 3/, The morphology evolution of the InN nanodots are studied by AFM. The structure of the prepared sample is characterized by X-ray diffraction (XRD) and Raman scattering. And the XPS has been used to investigate the elemental composition of InN nanodots. Our results demonstrate that In droplets catalyst MOCVD can be a very effective way to grow InN nanodots.