JOURNAL ARTICLE

Defect Structure at Buried Silicon Nitride Layers

E.H. Te KaatJürgen Belz

Year: 1985 Journal:   MRS Proceedings Vol: 45   Publisher: Cambridge University Press
Keywords:
Materials science Polycrystalline silicon Nitride Silicon nitride Crystallite Silicon Layer (electronics) Ion implantation Composite material Ion Optoelectronics Metallurgy

Metrics

6
Cited By
1.39
FWCI (Field Weighted Citation Impact)
5
Refs
0.84
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Ion-surface interactions and analysis
Physical Sciences →  Engineering →  Computational Mechanics
Advanced ceramic materials synthesis
Physical Sciences →  Materials Science →  Ceramics and Composites

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