Defect Structure at Buried Silicon Nitride Layers

E.H. Te Kaat; Jürgen Belz

doi:10.1557/proc-45-329

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Defect Structure at Buried Silicon Nitride Layers

E.H. Te Kaat Jürgen Belz

Year: 1985 Journal: MRS Proceedings Vol: 45 Publisher: Cambridge University Press

DOI: 10.1557/proc-45-329

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Keywords:

Materials science Polycrystalline silicon Nitride Silicon nitride Crystallite Silicon Layer (electronics) Ion implantation Composite material Ion Optoelectronics Metallurgy

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Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Defect Structure at Buried Silicon Nitride Layers

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