Pulsed laser deposition and characterization of conductive RuO<sub>2</sub> thin films

A. Iembo; F. Fuso; E. Arimondo; C. Ciofi; Gianmaria Pennelli; Giuseppe Currò; F. Neri; M. Allegrini

doi:10.1557/jmr.1997.0195

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Pulsed laser deposition and characterization of conductive RuO₂ thin films

A. Iembo F. Fuso E. Arimondo C. Ciofi Gianmaria Pennelli Giuseppe Currò F. Neri M. Allegrini

Year: 1997 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 12 (6)Pages: 1433-1436 Publisher: Springer Nature

DOI: 10.1557/jmr.1997.0195

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Keywords:

Materials science Thin film Pulsed laser deposition X-ray photoelectron spectroscopy Annealing (glass) Transmission electron microscopy Silicon Scanning electron microscope Substrate (aquarium) Optoelectronics Analytical Chemistry (journal) Characterization (materials science) Nanotechnology Chemical engineering Composite material

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Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Pulsed laser deposition and characterization of conductive RuO₂ thin films

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