Deposition and characterization of crystalline conductive RuO<sub>2</sub> thin films

Q. X. Jia; Shichao Song; S. R. Foltyn; Xin Wu

doi:10.1557/jmr.1995.2401

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Deposition and characterization of crystalline conductive RuO₂ thin films

Q. X. Jia Shichao Song S. R. Foltyn Xin Wu

Year: 1995 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 10 (10)Pages: 2401-2403 Publisher: Springer Nature

DOI: 10.1557/jmr.1995.2401

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Keywords:

Materials science Yttria-stabilized zirconia Thin film Pulsed laser deposition Epitaxy Substrate (aquarium) Cubic zirconia Electrical resistivity and conductivity Transmission electron microscopy Composite material Nanotechnology Layer (electronics) Ceramic

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Electronic and Structural Properties of Oxides

Physical Sciences → Materials Science → Materials Chemistry

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Deposition and characterization of crystalline conductive RuO₂ thin films

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