A fully integrated temperature compensation technique for piezoresistive pressure sensors

Abstract

A fully integrated temperature compensation technique for piezoresistive pressure sensors is presented. The technique is suitable for batch fabricated sensors operable over a temperature range of -40 degrees C-130 degrees C and a pressure range of 0-310 kPa. The implementing hardware for the technique is developed and verified through PSpice and VHDL simulations. The technique is very effective for pressure values below 240 kPa and provides reasonable results for higher pressures. The technique is structurally simple and uses standard IC fabrication technologies.< >