Temperature compensation of piezoresistive pressure sensors

Muhammad Akbar; M.A. Shanblatt

doi:10.1016/0924-4247(92)80161-u

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Temperature compensation of piezoresistive pressure sensors

Muhammad Akbar M.A. Shanblatt

Year: 1992 Journal: Sensors and Actuators A Physical Vol: 33 (3)Pages: 155-162 Publisher: Elsevier BV

DOI: 10.1016/0924-4247(92)80161-u

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Keywords:

Piezoresistive effect Fabrication Offset (computer science) Materials science Wafer Compensation (psychology) Pressure sensor Atmospheric temperature range Optoelectronics Electronic engineering Computer science Mechanical engineering Engineering Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Electrical and Thermal Properties of Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

3D IC and TSV technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Temperature compensation of piezoresistive pressure sensors

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