JOURNAL ARTICLE

Microstructural Observations of LPCVD Double Layer Polysilicon Thin Film Tensile Specimens

Keywords:
Materials science Polycrystalline silicon Thin film Ultimate tensile strength Crystallite Microelectronics Composite material Microstructure Silicon Layer (electronics) Chemical vapor deposition Optoelectronics Nanotechnology Thin-film transistor Metallurgy

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4
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0.91
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8
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0.78
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Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Surface Polishing Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
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