JOURNAL ARTICLE

Interface Structure and Dielectric Properties of SrTiO3Thin Film Sputter-Deposited onto Si Substrates

Keywords:
Materials science Dielectric Amorphous solid Annealing (glass) Thin film Sputter deposition Capacitance High-κ dielectric Sputtering Barrier layer Layer (electronics) Optoelectronics Composite material Nanotechnology Crystallography Electrode

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46
Cited By
4.73
FWCI (Field Weighted Citation Impact)
10
Refs
0.96
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Ferroelectric and Piezoelectric Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced ceramic materials synthesis
Physical Sciences →  Materials Science →  Ceramics and Composites
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