Interface Structure and Dielectric Properties of SrTiO<sub>3</sub>Thin Film Sputter-Deposited onto Si Substrates

S. Matsubara; T. Sakuma; Shintaro Yamamichi; Hisateru Yamaguchi; Yoichi Miyasaka

doi:10.1557/proc-200-243

ScienceGate Book Chapters

JOURNAL ARTICLE

Interface Structure and Dielectric Properties of SrTiO₃Thin Film Sputter-Deposited onto Si Substrates

S. Matsubara T. Sakuma Shintaro Yamamichi Hisateru Yamaguchi Yoichi Miyasaka

Year: 1990 Journal: MRS Proceedings Vol: 200 Publisher: Cambridge University Press

DOI: 10.1557/proc-200-243

Get Full-Text PDF Get Analytical Report

Keywords:

Materials science Dielectric Amorphous solid Annealing (glass) Thin film Sputter deposition Capacitance High-κ dielectric Sputtering Barrier layer Layer (electronics) Optoelectronics Composite material Nanotechnology Crystallography Electrode

Metrics

Cited By

4.73

FWCI (Field Weighted Citation Impact)

Refs

0.96

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Semiconductor materials and devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Interface Structure and Dielectric Properties of SrTiO₃Thin Film Sputter-Deposited onto Si Substrates

Metrics

Citation History

Topics

Related Documents

Dielectric properties of sputter-deposited BaTiO/sub 3/-SrTiO/sub 3/ thin films

Dielectric Properties of Pulsed Laser Deposited SrTiO₃ Thin Films

Structural properties of ultra-thin SrO film deposited on SrTiO₃

Properties of Nb₃Al Thin Films Sputter-Deposited on Sapphire Substrates

The electrical properties of sputtered YBa₂Cu₃O_{7- delta}thin films deposited onto (110) SrTiO₃substrates

Interface Structure and Dielectric Properties of SrTiO3Thin Film Sputter-Deposited onto Si Substrates

Metrics

Citation History

Topics

Related Documents

Dielectric properties of sputter-deposited BaTiO/sub 3/-SrTiO/sub 3/ thin films

Dielectric Properties of Pulsed Laser Deposited SrTiO3 Thin Films

Structural properties of ultra-thin SrO film deposited on SrTiO3

Properties of Nb3Al Thin Films Sputter-Deposited on Sapphire Substrates

The electrical properties of sputtered YBa2Cu3O7- deltathin films deposited onto (110) SrTiO3substrates

Interface Structure and Dielectric Properties of SrTiO₃Thin Film Sputter-Deposited onto Si Substrates

Dielectric Properties of Pulsed Laser Deposited SrTiO₃ Thin Films

Structural properties of ultra-thin SrO film deposited on SrTiO₃

Properties of Nb₃Al Thin Films Sputter-Deposited on Sapphire Substrates

The electrical properties of sputtered YBa₂Cu₃O_{7- delta}thin films deposited onto (110) SrTiO₃substrates